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GAS MASS FLOW METERS article

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 CODE : FG01

GAS MASS FLOW METERS

FLO-CONTROLLERS สามารถตรวจวัดและควบคุมก๊าซบริสุทธิ์ต่ำถึง 0-50 sccm หรือสูงถึง 0-10 L / นาที! สามารถทำซ้ำผลลัพธ์ได้

Specifications

Accuracy (including linearity, best fit straight line):

Model OR80: Standard: ±1.5% F.S. (10-100% rated flow)

Model OR80D: Standard: ±1.5% F.S. (10-100% rated flow)

2nd and 3rd gases (G9 or G10): ±3.0% F.S.

Model OR80S: Standard: ±1.5% F.S. (10-100% rated flow)

2nd and 3rd gases (G9 or G10): ±3.0% F.S.

Model OR80SD: Standard: ±1.5% F.S. (10-100% rated flow)

2nd and 3rd gases (G9 or G10): ±3.0% F.S.

Repeatability:

Model OR80: ±0.25% Full Scale (10-100% rated flow)

Model OR80D: ±0.25% Full Scale (10-100% rated flow)

Model OR80S: ±0.25% Full Scale (10-100% rated flow)

Model OR80SD: ±0.25% Full Scale (10-100% rated flow)

Pressure Rating:

Model OR80: 150 psig (10.3 bar)

Model OR80D: 150 psig (10.3 bar)

Model OR80S: 500 psig (34.5 bar)

Model OR80SD: 500 psig (34.5 bar)

Pressure Sensitivity:

Model OR80: ±0.02% F.S. per psi (per 69 mbar)

Model OR80D: ±0.02% F.S. per psi (per 69 mbar)

Model OR80S: ±0.02% F.S. per psi (per 69 mbar)

Model OR80SD: ±0.02% F.S. per psi (per 69 mbar)

Typical Operating Differential Pressure:

Model OR80: 15-45 psid (1-3 bar) Model OR80D: 15-45 psid (1-3 bar) Model OR80S: 15-45 psid (1-3 bar) Model OR80SD: 15-45 psid (1-3 bar)

Temperature Rating (Environment):

Model OR80: Operating: 5 to 55ºC

Storage: 0 to 70ºC

Model OR80D: Operating: 5 to 55ºC

Storage: 0 to 70ºC

Model OR80S: Operating: 5 to 55ºC

Storage: 0 to 70ºC

Model OR80SD: Operating: 5 to 55ºC

Storage: 0 to 70ºC

Valve Type:

Model OR80: Normally Closed

Positive Shutoff up to 60 psig (4 bar)

Model OR80D: Normally Closed

Positive Shutoff up to 60 psig (4 bar)

Model OR80S: Normally Closed

Positive Shutoff up to 60 psig (4 bar)

Model OR80SD: Normally Closed

Positive Shutoff up to 60 psig (4 bar)

Body Leak Integrity (not including fittings):

Model OR80: 1 x 10-7 sccs of He Model OR80D: 1 x 10-7 sccs of He Model OR80S: 1 x 10-7 sccs of He Model OR80SD: 1 x 10-7 sccs of He

Wetted Materials:

Model OR80: Aluminum

304 Stainless Steel

316 Stainless Steel

Model OR80D: Aluminum

304 Stainless Steel

316 Stainless Steel

Model OR80S: 303 Stainless Steel

304 Stainless Steel

316 Stainless Steel

Epoxy

Model OR80SD: 303 Stainless Steel

304 Stainless Steel

316 Stainless Steel

Epoxy

External Command/Setpoint Signal:

Model OR80: Integrated 2 Mohm load

0 VDC is zero flow

Model OR80D: Integrated 2 Mohm load

0 VDC is zero flow

Model OR80S: Integrated 2 Mohm load

0 VDC is zero flow

Model OR80SD: Integrated 2 Mohm load

0 VDC is zero flow

Temperature Sensitivity:

Model OR80: ±0.15% F.S. or less per ºC Model OR80D: ±0.15% F.S. or less per ºC Model OR80S: ±0.15% F.S. or less per ºC Model OR80SD: ±0.15% F.S. or less per ºC

Approvals/Certifications:

Model OR80: CE Approved

89/336/EEC (EN 55011 & EN 50082-1)

73/23/EEC Low Voltage Directive

Model OR80D: CE Approved

89/336/EEC (EN 55011 & EN 50082-1)

73/23/EEC Low Voltage Directive

Model OR80S: CE Approved

89/336/EEC (EN 55011 & EN 50082-1)

73/23/EEC Low Voltage Directive

Model OR80SD: CE Approved

89/336/EEC (EN 55011 & EN 50082-1)

73/23/EEC Low Voltage Directive

Internal Setpoint (Command) Signal:

Model OR80: Not available Model OR80D: Front panel adjustable Model OR80S: Not available Model OR80SD: Front panel adjustable

0-5 VDC Output:

Model OR80: Minimum 2.5 Kohm load

Model OR80D: Minimum 2.5 Kohm load

Model OR80S: Minimum 2.5 Kohm load

Model OR80SD: Minimum 2.5 Kohm load

Ratings:

Model OR80: IP10 (NEMA 1)

Model OR80D: IP10 (NEMA 1)

Model OR80S: IP10 (NEMA 1)

Model OR80SD: IP10 (NEMA 1)

 

 




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